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Pressure Relief Valve"Sputtering" is the process of applying film-like metal coatings onto a surface by bombarding the coating material with electrocharged ions. This causes the material to disintegrate and relocate on the substrate an atom layer at a time. The process allows a variety of coating materials to be deposited on various surfaces. Deposition Technology, Inc. (DTI) uses "sputtering" for window films, packaging materials, etc. Valves installed on two vacuum chambers which are part of DTI's system, were developed by Lewis Research Center and detailed in Tech Briefs. The valve protects the environment and frees the operator from monitoring the chamber venting.
Document ID
20020090871
Acquisition Source
Legacy CDMS
Document Type
Other
Date Acquired
August 20, 2013
Publication Date
January 1, 1985
Publication Information
Publication: Spinoff 1985
Subject Category
Mechanical Engineering
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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