NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login
Back to Results
Bi-Stable Thermal Microactuators Based on CVD DiamondIn this work, two examples of thermally driven MEMS devices based on polycrystalline diamond films are presented. These are a bi-stable diamond microswitch and a diamond micropump. By employing the classical bimetal effect and using diamond as a multi-purpose material (i.e. mechanical carrier, heater element, bi-metal element) the device layout can be rather simple. Device working principles, layouts, technology and first results on device operation are given.
Document ID
20030068546
Acquisition Source
Glenn Research Center
Document Type
Conference Paper
Authors
R Müller (Universität Ulm Ulm, Germany)
P Schmid (Universität Ulm Ulm, Germany)
A Munding (Universität Ulm Ulm, Germany)
F J Hernandez-Gullien (Universität Ulm Ulm, Germany)
E Kohn (Universität Ulm Ulm, Germany)
Date Acquired
August 21, 2013
Publication Date
August 1, 2003
Publication Information
Publication: Proceedings of the Seventh Applied Diamond Conference/Third Frontier Carbon Technology Joint Conference
Publisher: National Aeronautics and Space Administration
Subject Category
Electronics and Electrical Engineering
Report/Patent Number
NASA/CP-2003-212319
Meeting Information
Meeting: 3rd Frontier Carbon Technology (FCT) Joint Conference
Location: Tsukuba
Country: JP
Start Date: August 18, 2003
End Date: August 21, 2003
Sponsors: Nippon Institute of Technology, National Institute of Advanced Industrial Science and Technology, Glenn Research Center
Distribution Limits
Public
Copyright
Portions of document may include copyright protected material.
Keywords
CVD-Diamond
MEMS
Microswitch
Micropump
Document Inquiry

Available Downloads

There are no available downloads for this record.

Related Records

IDRelationTitle20030068525Collected WorksProceedings of the Seventh Applied Diamond Conference/Third Frontier Carbon Technology Joint Conference (ADC/FCT 2003)
No Preview Available