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Theoretical Analysis on Piezoresistive Effect of Diamond Films by Chemical Vapor DepositionThe piezoresistive effect in p-type heteroepitaxial diamond films was investigated. The diamond films were prepared on Si (100) by microwave plasma chemical vapor deposition. The films were boron doped by the cold implantation and rapid annealing technique. The experimental results showed that the gauge factor for the diamond films at 100 microstrain was about 1200 at room temperature. Based on the Fuchs and Sondheimer thin film theory and valence band split-off model, a theoretical calculation of the piezoresistive effect in diamond films was presented by Solving Boltzmanm transport equation in the relaxation time approximation and using the parallel connection resistance model. The analysis results were in good agreement with the experimental data.
Document ID
20030068553
Acquisition Source
Glenn Research Center
Document Type
Conference Paper
Authors
K J Liao (Chongqing University Chongqing, China)
W L Wang (Chongqing University Chongqing, China)
C Y Kong (Chongqing University Chongqing, China)
S X Wang (Chongqing University Chongqing, China)
Q Feng (Chongqing University Chongqing, China)
Y Ma (Chongqing University Chongqing, China)
Date Acquired
August 21, 2013
Publication Date
August 1, 2003
Publication Information
Publication: Proceedings of the Seventh Applied Diamond Conference/Third Frontier Carbon Technology Joint Conference
Publisher: National Aeronautics and Space Administration
Subject Category
Electronics and Electrical Engineering
Report/Patent Number
NASA/CP-2003-212319
Meeting Information
Meeting: 3rd Frontier Carbon Technology (FCT) Joint Conference
Location: Tsukuba
Country: JP
Start Date: August 18, 2003
End Date: August 21, 2003
Sponsors: Nippon Institute of Technology, National Institute of Advanced Industrial Science and Technology, Glenn Research Center
Funding Number(s)
CONTRACT_GRANT: NNSFC-50005027
Distribution Limits
Public
Copyright
Portions of document may include copyright protected material.
Keywords
CVD
Valence band split-off
Piezoresistive effect
Diamond films
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IDRelationTitle20030068525Collected WorksProceedings of the Seventh Applied Diamond Conference/Third Frontier Carbon Technology Joint Conference (ADC/FCT 2003)
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