Study of High Transparency Diamond Like Carbon Film on Quartz Substrate Growth by Hot-Filament Chemical Vapor Deposition

By using the mixed methane and hydrogen gas, we successfully synthesized Diamond Like Carbon (DLC) films on quartz substrate in Hot-Filament Chemical Vapor Deposition (HFCVD) system. The prepared films were proved to be the DLC films by investigating the Raman Spectroscopy and have both very high hardness and high transparency (>80%) from 400nm to the whole infrared band, which can be used as shields of optical windows. We also did a series of experiments to study relations between the growth of the film and the Substrate temperature, Flament temperature, the time of growth and the consistency of methane and hydrogen.