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Diamond Synthesis in Ten Minutes With Closed Reaction ChamberDiamond particles were synthesized on Si single crystal substrate in ten minutes reaction time. Reaction chamber was cylindrical shaped with 150mm in diameter and 180mm in height. Our synthesizing method is basically same as conventional hot filament method. Liquid carbon source and hydrogen were introduced to the chamber. Substrate was heated up with tungsten filament radiation to 780 deg C in three minutes. Then temperature was kept for another seven minutes and then cooled down. We got many diamond particles on Si substrate sized from 1 micron up to 10 microns. We tried doping with nickel, phosphorous and boron.
Document ID
20030068633
Acquisition Source
Glenn Research Center
Document Type
Conference Paper
Authors
Kaoru Gyoda (Teikyo University of Science and Technology Yamanashi, Japan)
Yuki Tanaka (Teikyo University of Science and Technology Yamanashi, Japan)
Kazuhiro Aoki (Teikyo University of Science and Technology Yamanashi, Japan)
Yoshiki Takagi (Teikyo University of Science and Technology Yamanashi, Japan)
Date Acquired
August 21, 2013
Publication Date
August 1, 2003
Publication Information
Publication: Proceedings of the Seventh Applied Diamond Conference/Third Frontier Carbon Technology Joint Conference
Publisher: National Aeronautics and Space Administration
Subject Category
Physics (General)
Report/Patent Number
NASA/CP-2003-212319
Meeting Information
Meeting: 3rd Frontier Carbon Technology (FCT) Joint Conference
Location: Tsukuba
Country: JP
Start Date: August 18, 2003
End Date: August 21, 2003
Sponsors: Nippon Institute of Technology, National Institute of Advanced Industrial Science and Technology, Glenn Research Center
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
diamond
CVD
hot filament
liquid carbon source
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IDRelationTitle20030068525Collected WorksProceedings of the Seventh Applied Diamond Conference/Third Frontier Carbon Technology Joint Conference (ADC/FCT 2003)
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