Selective Nano Copper Dot Formation on Diamond-Like Carbon Film

We selectively formed nano-scale copper dots on a structure-modulated Diamond-Like Carbon (DLC) films that was obtained by filtered vacuum arc (FVA) process using Si (100) substrate with nano-sized nickel dots on the surface. The structure modulated DLC film has nano-scale graphitic phases embedded in hard DLC matrix. The film exhibits significantly different surface properties that can be used for the selective copper dot formation on the surface. Copper thin film deposited on the structure-modulated film was thermally treated in hydrogen environment. Nano-sized copper dot could be obtained only on the nano-scale graphitic phase. Mechanism of the selective Cu dot formation will be discussed in terms of surface energy and morphology of the surface.