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Finite Element Analysis of MEMS DevicesA side-slide actuator and a corrugated diaphragm actuator will be analyzed and optimized this summer. Coupled electrostatic and fluid analyses will also be initiated. Both the side-slide actuator and the corrugated diaphragm actuator will be used to regulate the flow of fuel in a jet engine. Many of the side-slide actuators will be placed on top of a fuel injector that is still in the developmental stage as well. The corrugated diaphragm actuator will also be used to regulate the flow of fuel in fuel injectors. A comparative analysis of the performance matrix of both actuators will be conducted. The side-slide actuator uses the concept of mechanical advantage to regulate the flow of fuel using electrostatic forces. It is made from Nickel, Silicon Carbide, and thin layers of Oxide. The slider will have a hole in the middle that will allow fuel to pass through the hole underneath it. The goal is to regulate the flow of fuel through the inlet. This means that the actuator needs to be designed so that when a voltage is applied to the push rod, the slider will deflect in the x-direction and be able to completely block the inlet and no fuel can pass through. Different voltage levels will be tested. The parameters that are being optimized are the thickness of the diaphragm, what kind of corrugation the diaphragm should have, the length, width, and thickness of the push rod, and what design should be used to return the slider. The current possibilities for a return rod are a built in spring on the slider, a return rod that acts like a spring, or a return rod that is identical to the push rod. The final actuator design should have a push rod that has rotational motion and no translation motion, a push rod thickness that prevents warping due to the slider, and a large ratio of the displacement on the bottom of the push rod to displacement on the top of the push rod. The corrugated diaphragm actuator was optimized last winter and this summer will be spent completing the optimization of the coupled electrostatic and fluid flow parameters. It was found that Nickel is the best material to use for the diaphragm because it has a higher yield strength and allows for a larger stress, deflection and applied pressure. The parameters that were optimized were the wavelength and thickness of the diaphragm.
Document ID
Acquisition Source
Document Type
Corrigan, Jennifer
(Ohio Aerospace Inst. Cleveland, OH, United States)
Date Acquired
August 23, 2013
Publication Date
January 1, 2004
Publication Information
Publication: Research Symposium I
Subject Category
Mechanical Engineering
Distribution Limits
Work of the US Gov. Public Use Permitted.

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