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Micro electro mechanical systems (MEMS) actuator technologies for future spacecrafts
Document ID
20060028703
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/6643
Authors
Yang, E. H.
Date Acquired
August 23, 2013
Publication Date
March 1, 2003
Subject Category
Optics
Distribution Limits
Public
Copyright
Other
Keywords
MEMS microvalve adaptive optics

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