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Electron-beam fabrication of analog-relief diffractive optics of non-flat substrates at Jet Propulsion Laboratory
Document ID
20060029447
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/8088
Authors
Wilson, D.
Maker, P.
Muller, R.
Date Acquired
August 23, 2013
Publication Date
January 14, 2002
Subject Category
Optics
Distribution Limits
Public
Copyright
Other
Keywords
electron-beam lithography diffractive optics

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