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A piezoelectric unimorph deformable mirror fabricated by wafer transfer technology
Document ID
20060029723
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/8902
Authors
Yang, E. H.
Date Acquired
August 23, 2013
Publication Date
January 1, 2003
Subject Category
Optics
Distribution Limits
Public
Copyright
Other
Keywords
MEMS NEMS space NASA JPL adaptive optics piezoelectric film

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