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A CMOS-compatible process technique for fabricating laterally embedded multi-nanaochannels without sacrificial etching
Document ID
20060030484
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/11093
Authors
Yang, E.
Lee, C.
Myung, N.
George, T.
Date Acquired
August 23, 2013
Publication Date
June 8, 2003
Subject Category
Spacecraft Propulsion And Power
Distribution Limits
Public
Copyright
Other
Keywords
vavle MEMS micropropulsion microspacecraft microthruster microfluids

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