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Variable control MEMS valve for gas/liquid systems
Document ID
20060030719
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/11747
Authors
Yang, E. H.
Date Acquired
August 23, 2013
Publication Date
March 12, 2002
Subject Category
Optics
Distribution Limits
Public
Copyright
Other
Keywords
reflector
stroke actuator membrane transfer segmented space telescope NGST inflatable
deformable mirror microelectromechanical systems MEMS adaptive optics high

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