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A wafer transfer technology for MEMS adaptive optics
Document ID
20060030728
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/11758
Authors
Yang, E. H.
Date Acquired
August 23, 2013
Publication Date
February 11, 2002
Subject Category
Optics
Distribution Limits
Public
Copyright
Other
Keywords
MEMS NEMS space NASA JPL valve micro-propulsion micro-instruments TRL PICOSAT

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