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Minimum dimension dimple analysis. MEMS Reliability Alliance Technical Report 36-02
Document ID
20060031060
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/12168
Authors
Lin, G.
Lawton, R.
Wellman, J.
Phinney, L.
Date Acquired
August 23, 2013
Publication Date
July 14, 2000
Distribution Limits
Public
Copyright
Other
Keywords
MEMS reliability analysis

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