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Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01
Document ID
20060031061
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/12169
Authors
Lawton, R.
Lin, G.
Wellman, J.
Date Acquired
August 23, 2013
Publication Date
August 4, 2000
Distribution Limits
Public
Copyright
Other
Keywords
MEMS reliability analysis

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