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A displacement measuring laser heterodyne interferometer with sub-Angstrom accuracy
Document ID
20060031426
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/12638
Authors
Diaz, R. T.
Zhao, F.
Schmidtlin, E.
Date Acquired
August 23, 2013
Publication Date
April 20, 2001
Subject Category
Instrumentation And Photography
Distribution Limits
Public
Copyright
Other
Keywords
interferometry metrology nano-technology

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