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Wavefront versus amplitude division high precision displacement measuring interferometersWe discuss and compare different methods to reduce periodic nonlinear error and improve thermal stability. Experimental results will be presented and discussed.
Document ID
20060031767
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
Authors
Zhao, F.
Diaz, R. T.
Halverson, P. G.
Kuan, G. M.
Shaklan, S.
Date Acquired
August 23, 2013
Publication Date
September 20, 2001
Subject Category
Instrumentation And Photography
Distribution Limits
Public
Copyright
Other
Keywords
metrology laser interferometers

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