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Establishing Engineering Methods and Criteria Required by Predictive Analysis for Mechanical Reliability of MEMS StructuresThe expanding areas of MEMS applications are often characterized by demanding operating conditions or harsh environments for those sensitive devices.
Document ID
20060032257
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/13754
Authors
Lawton, R.
Knauss, W.
Date Acquired
August 23, 2013
Publication Date
January 22, 2000
Distribution Limits
Public
Copyright
Other
Keywords
MEMS Reliability Predictive Failure Analysis

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