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MEMS Packaging and Reliability Challenges
Document ID
20060032789
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/14497
Authors
Ghaffarian, R.
Rajeshuni, R.
Date Acquired
August 23, 2013
Publication Date
May 22, 2000
Distribution Limits
Public
Copyright
Other
Keywords
microelectromechanical systems MEMS COTS reliability packaging

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