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A water-transfer technique for a continuous membrane MEMS deformable mirror
Document ID
20060033616
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/16346
Authors
Yang, E.
Date Acquired
August 23, 2013
Publication Date
November 13, 2000
Subject Category
Optics
Distribution Limits
Public
Copyright
Other
Keywords
deformable mirrors continuous membranes membrane transfer

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