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3D Metrology for Process Control and Structure Integrity for Evaluating MEMS Reliability for Space ApplicationsMEMS fabrication processes are as diverse as their applications.
Document ID
20060034426
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/18424
Authors
Lawton, R.
Krueger, R.
Koester, D.
Date Acquired
August 23, 2013
Publication Date
October 26, 1999
Distribution Limits
Public
Copyright
Other
Keywords
MEMS Process

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