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Reliability Roadmap for Microstructures and Micromechanical SystemsReliability and quality issues are two of the main bottlenecks choking the effective commercialization of microsystem technology.
Document ID
20060034789
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/20409
Authors
Hartley, F.
Date Acquired
August 23, 2013
Publication Date
October 5, 1998
Distribution Limits
Public
Copyright
Other
Keywords
microsystem technology
Reliability Microstructures Micromechanical Systems sensors commercialization

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