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MEMS Magnetic Sensor in Standard CMOSA novel micromechanical magnetic sensor has been built and tested.
Document ID
20060034858
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/20631
Authors
Miller, L.
Eyre, B.
Pister, K.
Date Acquired
August 23, 2013
Publication Date
September 1, 1998
Subject Category
Electronics And Electrical Engineering
Distribution Limits
Public
Copyright
Other
Keywords
Magnetometer microsensor MEMS Magnetic sensor Micro-coil resonant mechanical
sensor

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