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A Micro-Fabricated Quadrupole Mass Spectrometer
Document ID
20060035426
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/22437
Authors
Brennan, R.
Chutjian, A.
Fuerstenau, S.
Hecht, M.
Orient, O.
Wiberg, D.
Yee, K.
Date Acquired
August 23, 2013
Publication Date
June 2, 1997
Distribution Limits
Public
Copyright
Other
Keywords
micro-scale mass filter field deployable instrument micro-machined mass
spectrometer reduced beam aperture area wire electro-discharge machining (EDM)

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