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Low-k interlevel dielectrics technology
Document ID
20060040090
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/7421
Authors
Petkov, M. P.
Date Acquired
August 23, 2013
Publication Date
January 1, 2003
Distribution Limits
Public
Copyright
Other
Keywords
low-k advanced technology

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