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A general approach to MEMS performance assurance
Document ID
20060040345
Acquisition Source
Jet Propulsion Laboratory
Document Type
Preprint (Draft being sent to journal)
External Source(s)
hdl:2014/12787
Authors
Wellman, J.
Date Acquired
August 23, 2013
Publication Date
January 1, 2001
Distribution Limits
Public
Copyright
Other
Keywords
micro-electromechanical systems reliabilty

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