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A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface MetrologyA multi-channel heterodyne laser interferometer is proposed for the JPL Thermo-Opto-Mechanical Testbed, which requires the measurement of optical surface deformations at the sub-nanometer level.
Document ID
20060040521
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/16646
Authors
Zhao, F.
Logan, J.
Shaklan, S.
Shao, M.
Date Acquired
August 23, 2013
Publication Date
June 16, 1999
Subject Category
Instrumentation And Photography
Distribution Limits
Public
Copyright
Other
Keywords
heterodyne interferometry inferometric metrology nano-technology

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