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A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-Nanometer Surface Metrology
Document ID
20060040728
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/17667
Authors
Zhao, F.
Logan, J.
Shaklan, S.
Shao, M.
Date Acquired
August 23, 2013
Publication Date
June 16, 1999
Subject Category
Instrumentation And Photography
Distribution Limits
Public
Copyright
Other
Keywords
heterodyne interferometry metrology nano-technology

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