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Pulsed-Source Interferometry for Characterization of Resonant Micromachined StructuresWe present a new microscopy tool for quantitative measurement of the resonant motion of microstructures. The new instrument uses optical interferometry to generate a three dimentional surface topographic map of a vibrating micormachined resonator in vacuum.
Document ID
20060041282
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/19426
Authors
Gutierrez, R. C.
Shcheglov, K. V.
Tang, T. K.
Date Acquired
August 23, 2013
Publication Date
June 7, 1998
Distribution Limits
Public
Copyright
Other
Keywords
microscopy tool micromachines

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