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Deep Reactive-Ion Etched Micro Valves for Spacecraft PropulsionWe report on the design, and test setup of a silicon diaphragm micro valve.
Document ID
20060041591
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/20661
Authors
Tang, W.
Chakraborty, I.
Pyle, D.
Date Acquired
August 23, 2013
Publication Date
November 1, 1998
Subject Category
Spacecraft Propulsion And Power
Distribution Limits
Public
Copyright
Other
Keywords
MEMS valve deep Reactive-Ion Etching Propulsion

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