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A piezoelectric liquid-compatible microvalve for integrated micropropulsionA leak-tight, low-power, liquid-compatible, piezoelectric microvalve has been designed, fabricated, and fully characterized.
Document ID
20060043193
Acquisition Source
Jet Propulsion Laboratory
Document Type
Conference Paper
External Source(s)
hdl:2014/37849
Authors
Lee, Choonsup
Yang, Eui-Hyeok
Date Acquired
August 23, 2013
Publication Date
June 1, 2004
Subject Category
Spacecraft Propulsion And Power
Meeting Information
Meeting: Solid-State Sensor, Actuator, and Microsystems Workshop
Location: Hilton Head, SC
Country: United States
Start Date: June 1, 2004
Distribution Limits
Public
Copyright
Other
Keywords
micropropulsion
piezoelectric
microvalve
MEMS

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