Optimized design, fabrication and charactrization of PZT unimorph microactuators for deformable mirrors

This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs).

Document ID

20060043338

Acquisition Source

Jet Propulsion Laboratory

Document Type

Conference Paper

External Source(s)

Authors

Date Acquired

August 23, 2013

Publication Date

November 1, 2004

Subject Category

Distribution Limits

Public

Other

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