Frequency Domain Modeling of SAW Devices

New SAW sensors for integrated vehicle health monitoring of aerospace vehicles are being investigated. SAW technology is low cost, rugged, lightweight, and extremely low power. However, the lack of design tools for MEMS devices in general, and for Surface Acoustic Wave (SAW) devices specifically, has led to the development of tools that will enable integrated design, modeling, simulation, analysis and automatic layout generation of SAW devices. A frequency domain model has been created. The model is mainly first order, but it includes second order effects from triple transit echoes. This paper presents the model and results from the model for a SAW delay line device.