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Enhanced vacuum arc vapor deposition electrodeA process for forming a thin metal coating on a substrate wherein a gas stream heated by an electrical current impinges on a metallic target in a vacuum chamber to form a molten pool of the metal and then vaporize a portion of the pool, with the source of the heated gas stream being on one side of the target and the substrate being on the other side of the target such that most of the metallic vapor from the target is directed at the substrate.
Document ID
20080004537
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Weeks, Jack L.
Todd, Douglas M.
Date Acquired
August 24, 2013
Publication Date
April 6, 1999
Subject Category
Mechanical Engineering
Report/Patent Number
Patent Application Number: US-PATENT-APPL-SN-772541
Patent Number: US-PATENT-5,891,312
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-5,891,312
Patent Application
US-PATENT-APPL-SN-772541

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