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Thin film 2H .alpha.-SiCThin films of 2H .alpha.-silicon carbide are produced by pulsed laser ablation.
Document ID
20080004602
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Stan, Mark Anthony
Patton, Martin Owen
Warner, Joseph Dale
Date Acquired
August 24, 2013
Publication Date
March 3, 1998
Subject Category
Solid-State Physics
Funding Number(s)
CONTRACT_GRANT: NCC3-222
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-5,723,880
Patent Application
US-PATENT-APPL-SN-484761

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