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Lithography system using quantum entangled photonsA system of etching using quantum entangled particles to get shorter interference fringes. An interferometer is used to obtain an interference fringe. N entangled photons are input to the interferometer. This reduces the distance between interference fringes by n, where again n is the number of entangled photons.
Document ID
20080004949
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Williams, Colin
Dowling, Jonathan
della Rossa, Giovanni
Date Acquired
August 24, 2013
Publication Date
November 12, 2002
Subject Category
Optics
Report/Patent Number
Patent Application Number: US-PATENT-APPL-SN-393200
Patent Number: US-PATENT-6,480,283
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-6,480,283
Patent Application
US-PATENT-APPL-SN-393200
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