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Micromachined double resonatorA micromachined resonator mountable to an external support structure has a proof mass coupled to a base structure by a first spring structure, the base structure having a plurality of electrodes, and a second spring structure coupling the base structure to the external support structure.
Document ID
20080005016
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Gutierrez, Roman
Tang, Tony K.
Shcheglov, Kirill
Date Acquired
August 24, 2013
Publication Date
April 9, 2002
Subject Category
Mechanical Engineering
Report/Patent Number
Patent Application Number: US-PATENT-APPL-SN-588878
Patent Number: US-PATENT-6,367,786
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-6,367,786
Patent Application
US-PATENT-APPL-SN-588878

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