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Fabricating a hybrid imaging deviceA hybrid detector or imager includes two substrates fabricated under incompatible processes. An array of detectors, such as charged-coupled devices, are formed on the first substrate using a CCD fabrication process, such as a buried channel or peristaltic process. One or more charge-converting amplifiers are formed on a second substrate using a CMOS fabrication process. The two substrates are then bonded together to form a hybrid detector.
Document ID
20080005097
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Wadsworth, Mark
Atlas, Gene
Date Acquired
August 24, 2013
Publication Date
July 8, 2003
Subject Category
Instrumentation And Photography
Report/Patent Number
Patent Number: US-PATENT-6,590,197
Patent Application Number: US-PATENT-APPL-SN-978621
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-6,590,197
Patent Application
US-PATENT-APPL-SN-978621
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