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Split-resonator integrated-post MEMS gyroscopeA split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.
Document ID
20080005159
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other - Patent
Authors
Bae, Youngsam
Hayworth, Ken J.
Shcheglov, Kirill V.
Date Acquired
August 24, 2013
Publication Date
September 28, 2004
Subject Category
Instrumentation And Photography
Report/Patent Number
Patent Application Number: US-PATENT-APPL-SN-441892
Patent Number: US-PATENT-6,796,179
Funding Number(s)
CONTRACT_GRANT: NAS7-1407
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-6,796,179
Patent Application
US-PATENT-APPL-SN-441892
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