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Fluid jet seed particle generator for silane pyrolysis reactorMethod is provided for generating fine sized seed particles of silicon for use in the fluidized bed pyrolysis of silane.
Document ID
20080007392
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other - Patent
Authors
Iya, Sridhar K.
Date Acquired
August 24, 2013
Publication Date
January 3, 1984
Subject Category
Inorganic, Organic And Physical Chemistry
Report/Patent Number
Patent Number: US-PATENT-4,424,199
Patent Application Number: US-PATENT-APPL-SN-329956
Funding Number(s)
CONTRACT_GRANT: NAS7-100
CONTRACT_GRANT: JPL-954334
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-4,424,199
Patent Application
US-PATENT-APPL-SN-329956

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