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Zone heating for fluidized bed silane pyrolysisAn improved heated fluidized bed reactor and method for the production of high purity polycrystalline silicon by silane pyrolysis wherein silicon seed particles are heated in an upper heating zone of the reactor and admixed with particles in a lower reaction zone, in which zone a silane-containing gas stream, having passed through a lower cooled gas distribution zone not conducive to silane pyrolysis, contacts the heated seed particles whereon the silane is heterogeneously reduced to silicon.
Document ID
20080008189
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other - Patent
Authors
Iya, Sridhar K.
Date Acquired
August 24, 2013
Publication Date
August 4, 1987
Subject Category
Inorganic, Organic And Physical Chemistry
Report/Patent Number
Patent Number: US-PATENT-4,684,513
Patent Application Number: US-PATENT-APPL-SN-760573
Funding Number(s)
CONTRACT_GRANT: NAS7-100
CONTRACT_GRANT: JPL-954334
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-4,684,513
Patent Application
US-PATENT-APPL-SN-760573
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