Super-resolution imaging system

The resolution of an imaging system is greatly enhanced by radiating an object with a plane wave field from a coherent source variable in either frequency, angle or distance from the object, detecting the wave field transmitted through, or reflected from, the object at some point on the image of the object, with or without heterodyne detection, and with or without a lens system. The heterodyne detected output of the detector is processed to obtain the Fourier transform as a function of the variable for a direct measurement of the amplitude and surface height structure of the object within a resolution cell centered at the corresponding point on the object. In the case of no heterodyne detection, only intensity data is obtained for a Fourier spectrum.