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Ampoule sealing apparatus and processAn apparatus 10 for effecting sealing of a fused quartz ampoule 24 while maintaining a vacuum on the ampoule via system 12 is disclosed. A plug 28 of fused quartz is lowered into the vertically disposed ampoule 24 (while maintaining the vacuum thereon) and heat sealed therein to prevent any vapor escape from, or contamination of, the contained semiconductor growth charge 29 during subsequent semiconductor crystal growth processes. A rotary vacuum feed-through mechanism 16 selectively rotates axle 34 and spool 32 to unwind wire 30 for lowering of plug 28 into the reduced diameter portion 24b of ampoule 24. Ampoule 24 is hermatically connected to vacuum housing 18 by quick release flange 20 wherein O-ring 22 retains ampoule 24.
Document ID
20080012386
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Debnam, Jr., William J.
Clark, Ivan O.
Date Acquired
August 24, 2013
Publication Date
November 22, 1988
Subject Category
Mechanical Engineering
Report/Patent Number
Patent Number: US-PATENT-4,785,608
Patent Application Number: US-PATENT-APPL-SN-393567
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-4,785,608
Patent Application
US-PATENT-APPL-SN-393567
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