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Patterning Techniques for Magnesium Diboride Films for Superconducting Transition Edge Sensor Bolometer ArraysWe present a comparison of several patterning techniques for magnesium diboride films with the goal of making membrane-supported superconducting transition edge sensor bolometer arrays suited for far infrared exploration of outer planets and icy moons. We compare etch properties such as etch rate, selectivity to resist, and edge roughness for wet etching, reactive ion etching, and ion-milling processes.
Document ID
20080031692
Acquisition Source
Goddard Space Flight Center
Document Type
Conference Paper
Authors
Travers, D. E. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Aslam, S. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Hsieh, W. T. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Jones, H. H. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Lakew, B. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Stevenson, T. R. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Date Acquired
August 24, 2013
Publication Date
August 17, 2008
Subject Category
Solid-State Physics
Meeting Information
Meeting: Applied Superconductivity Conference
Location: Chicago, IL
Country: United States
Start Date: August 17, 2008
End Date: August 22, 2008
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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