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MEMS/ECD Method for Making Bi(2-x)Sb(x)Te3 Thermoelectric DevicesA method of fabricating Bi(2-x)Sb(x)Te3-based thermoelectric microdevices involves a combination of (1) techniques used previously in the fabrication of integrated circuits and of microelectromechanical systems (MEMS) and (2) a relatively inexpensive MEMS-oriented electrochemical-deposition (ECD) technique. The present method overcomes the limitations of prior MEMS fabrication techniques and makes it possible to satisfy requirements.
Document ID
20090011287
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other - NASA Tech Brief
Authors
Lim, James
(California Inst. of Tech. Pasadena, CA, United States)
Huang, Chen-Kuo
(California Inst. of Tech. Pasadena, CA, United States)
Ryan, Margaret
(California Inst. of Tech. Pasadena, CA, United States)
Snyder, G. Jeffrey
(California Inst. of Tech. Pasadena, CA, United States)
Herman, Jennifer
(California Inst. of Tech. Pasadena, CA, United States)
Fleurial, Jean-Pierre
(California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 24, 2013
Publication Date
July 1, 2008
Publication Information
Publication: NASA Tech Briefs, July 2008
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
NPO-30797
Distribution Limits
Public
Copyright
Public Use Permitted.
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