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Graded Index Silicon Geranium on Lattice Matched Silicon Geranium Semiconductor AlloyA lattice matched silicon germanium (SiGe) semiconductive alloy is formed when a {111} crystal plane of a cubic diamond structure SiGe is grown on the {0001} C-plane of a single crystalline Al2O3 substrate such that a <110> orientation of the cubic diamond structure SiGe is aligned with a <1,0,-1,0> orientation of the {0001} C-plane. A lattice match between the substrate and the SiGe is achieved by using a SiGe composition that is 0.7223 atomic percent silicon and 0.2777 atomic percent germanium. A layer of Si(1-x), ,Ge(x) is formed on the cubic diamond structure SiGe. The value of X (i) defines an atomic percent of germanium satisfying 0.2277
Document ID
20090029938
Acquisition Source
Headquarters
Document Type
Other - Patent
Authors
Park, Yeonjoon
(NASA Langley Research Center Hampton, VA, United States)
Choi, Sang H.
(NASA Langley Research Center Hampton, VA, United States)
King, Glen C.
(NASA Langley Research Center Hampton, VA, United States)
Elliott, James R., Jr.
(NASA Langley Research Center Hampton, VA, United States)
Stoakley, Diane M.
(NASA Langley Research Center Hampton, VA, United States)
Date Acquired
August 24, 2013
Publication Date
April 7, 2009
Subject Category
Metals And Metallic Materials
Report/Patent Number
Patent Application Number: US-Patent-Appl-SN-11/387086
Patent Number: NASA-Case-LAR-16872-1
Patent Number: US-Patent-7514726
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-Case-LAR-16872-1|US-Patent-7514726
Patent Application
US-Patent-Appl-SN-11/387086
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