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Micromachined Artificial HaircellA micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.
Document ID
20100017561
Acquisition Source
Goddard Space Flight Center
Document Type
Other - Patent
Authors
Liu, Chang
Engel, Jonathan
Chen, Nannan
Chen, Jack
Date Acquired
August 24, 2013
Publication Date
February 16, 2010
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
Patent Number: US-Patent-7,661,319
Patent Application Number: US-Patent-Appl-SN-11/809,523
Funding Number(s)
CONTRACT_GRANT: NAG5-8781
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-7,661,319
Patent Application
US-Patent-Appl-SN-11/809,523

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