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Processing Nanostructured Sensors Using Microfabrication TechniquesStandard microfabrication techniques can be implemented and scaled to help assemble nanoscale microsensors. Currently nanostructures are often deposited onto materials primarily by adding them to a solution, then applying the solution in a thin film. This results in random placement of the nanostructures with no controlled order, and no way to accurately reproduce the placement. This method changes the means by which microsensors with nanostructures are fabricated. The fundamental advantage to this approach is that it enables standard microfabrication techniques to be applied in the repeated manufacture of nanostructured sensors on a microplatform.
Document ID
20100024411
Acquisition Source
Glenn Research Center
Document Type
Other - NASA Tech Brief
Authors
Hunter, Gary W.
(NASA Glenn Research Center Cleveland, OH, United States)
VanderWal, Randall L.
(NASA Glenn Research Center Cleveland, OH, United States)
Evans, Laura J.
(NASA Glenn Research Center Cleveland, OH, United States)
Xu, Jennifer C.
(NASA Glenn Research Center Cleveland, OH, United States)
Date Acquired
August 24, 2013
Publication Date
July 1, 2010
Publication Information
Publication: NASA Tech Briefs, July 2010
Subject Category
Instrumentation And Photography
Report/Patent Number
LEW-18418-1
Distribution Limits
Public
Copyright
Public Use Permitted.
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