Automatic Alignment of Displacement-Measuring Interferometer

A control system strives to maintain the correct alignment of a laser beam in an interferometer dedicated to measuring the displacement or distance between two fiducial corner-cube reflectors. The correct alignment of the laser beam is parallel to the line between the corner points of the corner-cube reflectors: Any deviation from parallelism changes the length of the optical path between the reflectors, thereby introducing a displacement or distance measurement error. On the basis of the geometrical optics of corner-cube reflectors, the length of the optical path can be shown to be L = L(sub 0)cos theta, where L(sub 0) is the distance between the corner points and theta is the misalignment angle. Therefore, the measurement error is given by DeltaL = L(sub 0)(cos theta - 1). In the usual case in which the misalignment is small, this error can be approximated as DeltaL approximately equal to -L(sub 0)theta sup 2/2. The control system (see figure) is implemented partly in hardware and partly in software. The control system includes three piezoelectric actuators for rapid, fine adjustment of the direction of the laser beam. The voltages applied to the piezoelectric actuators include components designed to scan the beam in a circular pattern so that the beam traces out a narrow cone (60 microradians wide in the initial application) about the direction in which it is nominally aimed. This scan is performed at a frequency (2.5 Hz in the initial application) well below the resonance frequency of any vibration of the interferometer. The laser beam makes a round trip to both corner-cube reflectors and then interferes with the launched beam. The interference is detected on a photodiode. The length of the optical path is measured by a heterodyne technique: A 100- kHz frequency shift between the launched beam and a reference beam imposes, on the detected signal, an interferometric phase shift proportional to the length of the optical path. A phase meter comprising analog filters and specialized digital circuitry converts the phase shift to an indication of displacement, generating a digital signal proportional to the path length.