Planar Rotary Piezoelectric Motor Using Ultrasonic Horns

A motor involves a simple design that can be embedded into a plate structure by incorporating ultrasonic horn actuators into the plate. The piezoelectric material that is integrated into the horns is pre-stressed with flexures. Piezoelectric actuators are attractive for their ability to generate precision high strokes, torques, and forces while operating under relatively harsh conditions (temperatures at single-digit K to as high as 1,273 K). Electromagnetic motors (EM) typically have high rotational speed and low torque. In order to produce a useful torque, these motors are geared down to reduce the speed and increase the torque. This gearing adds mass and reduces the efficiency of the EM. Piezoelectric motors can be designed with high torques and lower speeds directly without the need for gears. Designs were developed for producing rotary motion based on the Barth concept of an ultrasonic horn driving a rotor. This idea was extended to a linear motor design by having the horns drive a slider. The unique feature of these motors is that they can be designed in a monolithic planar structure. The design is a unidirectional motor, which is driven by eight horn actuators, that rotates in the clockwise direction. There are two sets of flexures. The flexures around the piezoelectric material are pre-stress flexures and they pre-load the piezoelectric disks to maintain their being operated under compression when electric field is applied. The other set of flexures is a mounting flexure that attaches to the horn at the nodal point and can be designed to generate a normal force between the horn tip and the rotor so that to first order it operates independently and compensates for the wear between the horn and the rotor.